SiC功率器件制造裝備技術(shù)及發(fā)展趨勢(shì)Technology and development trends of SiC power devices manufacturing equipment鞏小亮中國(guó)電子科技集團(tuán)公司第四十八研究所、半導(dǎo)體裝備研究部主任Xiaoliang GONGDirector of Semiconductor equipment research department, The 48th Research Institute of China Electronics Technology Group Corporation